The Definition Of Pads For Polishing And Its Influencing Factors?
Aug 04, 2021
Pads for polishing are also called polishing skins, polishing cloths, polishing pads, and are important auxiliary materials that determine the surface quality in chemical mechanical polishing.
Pads for polishing according to whether it contains abrasives, it can be divided into abrasive polishing pads and non-abrasive polishing pads; according to different materials, it can be divided into polyurethane polishing pads, non-woven polishing pads and composite polishing pads; according to the different surface structures, it can be roughly divided into flat types , Grid type and spiral line type.
Influencing factors of pads for polishing
①Hardness-the hardness of the polishing pad determines the ability to maintain the accuracy of the surface shape;
②The compression ratio-the compression ratio reflects the anti-deformation ability of the polishing pad;
③Conservation-the conservation of the polishing pad is the quality of the polishing liquid stored in the polishing pad per unit volume;
④Roughness-surface roughness is the unevenness of the polishing pad surface;
⑤ Density-Density is the compactness of the polishing pad material;







