What is the role of the polishing pad

Polishing pads are also called polishing leathers, polishing cloths, polishing sheets, etc. The surface structure is divided into flat, grid, and spiral types, which are important auxiliary materials that determine the surface quality in chemical mechanical polishing.

What is the role of the polishing pad:

①Effectively and evenly transport the polishing liquid to different areas of the polishing pad;

②The chemical reaction after polishing is fully carried out; the reactants and debris are discharged smoothly to achieve the removal effect;

③Maintain the polishing liquid film on the surface of the polishing pad so that the chemical reaction can proceed fully;

④ Keep the polishing process stable and the surface is not deformed, in order to obtain a better wafer surface morphology;