What is the role of the polishing pad

Some polishing pads are also called polishing leather, polishing cloth, polishing pads, etc. The surface structure is divided into plane type, grid type and spiral line type, etc. It is an important auxiliary material that determines the surface quality in chemical mechanical polishing.

Here is a brief introduction to the role of polishing pads:

① The polishing liquid is effectively and evenly delivered to different areas of the polishing pad;

② The chemical reaction will be fully carried out after polishing; the reactants and debris will be discharged smoothly to achieve the removal effect;

③ Maintain the polishing liquid film on the surface of the polishing pad so that the chemical reaction can fully proceed;

④ Keep the polishing process stable and the surface is not deformed, so as to obtain a better wafer surface morphology;